Features  

·For the low-temperature process requirements of Perovskite solar cells, all function layers are high-quality, uniform and pinhole-free, especially, no bombardment in the vacuum deposition;

·High film coverage on silicon surface, small dead area of module; The film growth environment is controllable in-situ, with good repeatability and high yield;

·Those equipment can meet the requirements of new functional materials, different processes, and customization;

·Production line can be integrated, with less area and lower cost;

·MES system automatically monitors the whole processes of the entire line, with automatic or manual modes, and upgrading the intelligent production line by Automatic Guided Vehicle (AGV).